ALD-Anlage
Closed
The source does not publish a status. We worked this out from the opening and closing dates it does publish.
Das Leibniz-Institut für Photonische Technologien e.V. schreibt für die Dünnschichtabscheidung eine Plasma-gestützte Atomlagenabscheidungsanlage (kurz: PE-ALD, engl. Plasma enhanced atomic layer deposition) aus, welche zum Abscheiden von Dünnschichten auf unterschiedlichen Substraten vom Einzelchipformat (5 x 5 mm²) bis mindestens 150 mm Wafer eingesetzt werden soll. Die zentralen Anforderungen an das System sind reproduzierbare Abscheideprozesse verschiedener leitfähiger, halbleitender und dielektrischer Schichten. Diese sollen auch ohne Vakuumunterbrechung (Multilagen) prozessiert werden. Ein Steuer-PC mit Monitor, Tastatur, Maus, entsprechender Software-Lizenzen und aktuellem Betriebssystem (Win 11) ist mitzuliefern.
- Status
- Closed
- Deadline
- Published
- Country
- Germany
- Funder
- Leibniz-Institut für Photonische Technologien e.V.
- Official page
- Open at the source portal
What applying involved
2 steps, all of them taken from this call's own documents.
This call is closed. The steps below show what applying involved, and are kept for reference only.
Understand the call
- Read the call on the source portal and download its documents
Submit
- Submit before the closing date shown above
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Where this came from
- Source document
- https://oeffentlichevergabe.de/api/notice-exports?pubMonth=2026-08
- Document fingerprint
20bc2ae980c2531f(SHA-256, first 16 hex characters)- Collected
- First recorded here
What has changed
- deadline changed from 2026-08-25 to 2026-09-01 on
- published_on changed from 2026-08-07 to 2026-08-25 on
- deadline changed from 2026-08-11 to 2026-08-25 on
- published_on changed from 2026-07-07 to 2026-08-07 on
- deadline changed from 2026-09-01 to 2026-08-11 on
- published_on changed from 2026-08-25 to 2026-07-07 on
- status changed from open to closed on
- deadline changed from 2026-08-25 to 2026-09-01 on
- published_on changed from 2026-08-07 to 2026-08-25 on
- status changed from closed to open on
- deadline changed from 2026-08-11 to 2026-08-25 on
- published_on changed from 2026-07-07 to 2026-08-07 on
Data source
Source: Datenservice Öffentlicher Einkauf (Bundesministerium für Wirtschaft und Klimaschutz). CC0 1.0 (CC-ZERO) — no conditions.
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